precision hot plate / ceramic

Description

Ceramic hot plates made of silicon nitride can be produced with an outer diameter of 400 mm. Within this diameter any rectangular shapes, customized shapes and openings are possible. A typical height of the plates is 5 mm and with an integrated cooling channel about 15 mm. The special properties and low mass of the ceramic material allow fast heating rates, uniform temperature distribution and outstanding precision in control. In comparison to metal the surface of ceramic stays flat due to its low thermal expansion even when operated with fast changes in temperature. The high strength of hot-pressed silicon nitride guarantees high stress resistance (e. g. with high pressure loads) and excellent wear resistance. The hot plates are very suitable for demanding processes in semiconductor processing systems.